Document Type

Article

Date

1997

Keywords

VLSI and simulation, multiprocessors, concurrency, Monte Carlo, plasma

Language

English

Disciplines

Computer Sciences

Description/Abstract

This paper summarizes the computational techniques behind a novel concurrent simulation method used for studying the neutral flow inside plasma reactors. The technique is intended to cope with low pressure flow (less than 1.5 Torr) in realistic three-dimensional geometries. It is based on the Direct Simulation Monte Carlo method to accurately model rarefied gas flow. The concurrent formulation operates on a broad variety of shared-memory multiprocessors, multicomputers, and networked workstations.

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