VLSI and simulation, multiprocessors, concurrency, Monte Carlo, plasma
This paper summarizes the computational techniques behind a novel concurrent simulation method used for studying the neutral flow inside plasma reactors. The technique is intended to cope with low pressure flow (less than 1.5 Torr) in realistic three-dimensional geometries. It is based on the Direct Simulation Monte Carlo method to accurately model rarefied gas flow. The concurrent formulation operates on a broad variety of shared-memory multiprocessors, multicomputers, and networked workstations.
Rieffel, Marc; Taylor, Stephen; Watts, Jerrell; and Shankar, Sadasivan, "Concurrent Simulation of Plasma Reactors" (1997). College of Engineering and Computer Science - Former Departments, Centers, Institutes and Projects. 23.