Document Type

Article

Date

5-15-1995

Embargo Period

4-29-2013

Keywords

Aluminium; Annealing; Clusters; Vacancies

Disciplines

Chemistry

Description/Abstract

We investigated the applicability of a model based on fractals and the Smoluchowski kinetic equations to describe hillock formation in thin metal films. We have previously used this model to analyze cluster and ultrafine particle production. We show how to extract two parameters from measured hillock size distributions which may reveal the scaling of the mobility of clusters and vacancies in films with varying hillock size. On the basis of our application of this model to certain data taken from the literature, the model shows considerable potential for being able to provide an internally consistent quantitative basis for monitoring thermally driven mass redistribution processes in metal films.

Additional Information

Copyright 1995 Thin Solid Films. This article may be downloaded for personal use only. Any other use requires prior permission of the author and Thin Solid Films.

The article may be found athttp://www.sciencedirect.com/science/article/pii/0040609094064792

Source

local input

Creative Commons License

Creative Commons License
This work is licensed under a Creative Commons Attribution 3.0 License.

Included in

Chemistry Commons

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